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Micro Vacuum Probe Station
Micro Vacuum Probe Station (MVPS) is a very small internal volume Probe Station with 100cc. It is a unique research equipment capable of probing under vacuum and the precise temperature conditions. There are three models depending on the temperature range –40 ~ +200 ℃, RT ~ +650 ℃( maximum annealing temp.: 1000 ℃) and 77K ~ 300K. Probing is possible while irradiating light on a sample, and using an optical microscope can observe the physical properties of the sample change with temperature. Optional built-in humidity sensor inside the MVPS is also possible to monitor humidity.
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