Ceramic Heater Type Micro Probe Station (MPS-CHH) is a subminiature probe station with vacuum and temperature control functions. It can measure the electrical and dielectric properties of thin films in the temperature range of room temperature to 750°C. It is equipped with a cooling block decreasing the temperature of the chamber for a long time operating. Also, it is possible to use a microscope and a sapphire (or fused silica) viewport cover for optical measurements.
– Easy Probing at RT ~ 750℃
– Compact Internal Volume ( ~ 100 cc)
– Rhodium Probe Tip (for probing at high temperature)