Ceramic Heater Type Micro Vacuum Probe Station (MVPS-CH) is a subminiature probe station with vacuum and temperature control functions. It can measure the electrical and dielectric properties of thin films in the temperature range of room temperature to 750°C. It can be operated without a cooling unit for an hour at 500°C. Additional cooling systems are required for measurements above that. Also, it is possible to use a microscope and a sapphire (or fused silica) viewport cover for optical measurements.